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IUVSTA Workshop on Ultra-Clean Vacuum

IUVSTA Workshop on Ultra-Clean Vacuum

IUVSTA Workshop on Ultra-Clean Vacuum

The International Union for Vacuum Science, Technique, and Applications (IUVSTA) embraces the 4-day IUVSTA workshop on ultra-clean vacuum from February 3rd to 6th, 2025, in the city of Delft, The Netherlands.

Vacuum technology is a key factor in various industries like semiconductors, metrology, space technology, large-scale scientific instruments, etc. This workshop focuses on the challenges of high vacuum (HV) and ultra-high vacuum (UHV) technologies in the so-called applications.

The workshop topics include challenges of maintaining ultra-clean vacuum conditions in analytical equipment like surface analysis techniques and electron microscopes, high purity vacuum components for UCV, UHV & XHV, innovative techniques and technologies for monitoring, cleaning, and controlling molecular and particulate contamination (as dust), contamination deposition from the air and low-pressure gas ambient and its impact on semiconductor surfaces, etc.

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