Products
High Vacuum Desk Sputter Coater – DST1-170
for uniform thin-film deposition
Research-grade High-Vacuum Sputter Coater
The high-vacuum magnetron desk sputter coater model DST1-170 is a compact coating system with the ability to coat metals (Oxidizing and non-oxidizing), suitable for short-term deposition periods. DST1-170 is able to deposit uniform thin films with fine-grain sizes in a fast cycle time.
High vacuum sputter coater – DST1-170 is configured as a desk sputter coater suitable for scanning electron microscope (SEM) sample preparation. A wide range of noble and oxidizing metals could be deposited by DST1-170 such as gold (Au), platinum/palladium (Pt/Pd) alloy, silver (Ag), chromium (Cr), tungsten (W), iridium (Ir), and etc.
This high vacuum coater, DST1-170, offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high quality characterization such as FE-SEM, EDS/WDS, TEM, and EBSD. The DST1-170 with a 2” magnetron cathode, 80 W switching DC power supply, could be used for research and different thin film applications.
DST1 can be equipped with a water-cooled cathode which make it suitable for long time deposition.
The maximum size of substrates in this model could be 4 inches.
Clean Vacuum of DST1-170
The vacuum chamber is Cylindrical Pyrex. The DST1-170 is fitted with an internally mounted 90 L/s turbomolecular pump, backed by a 6 m3/h two stage rotary vane pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.
Touch Screen Control
The DST1-170 is equipped with a 7” colored touch screen and full automatic control using a user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen. The last 300 coatings information is saved on the history page.
- High vacuum level with built-in turbomolecular pump 90 L/S (Leybold)
- Two stage rotary vane backing pump (Diaphragm and scroll pump)
- Full range vacuum gauge
- 80 W switching DC power supply
- Quartz crystal thickness monitor with precision of 1 nm and resolution of 1 Å
- One 2-inch magnetron cathode
- Electronic leak valve for Argon gas
- Sample rotation, height, and tilt adjustable
- Planetary rotating sample holder
- Equipped with electronic shutter
- Easy-to-change specimen stages (Rotation stage as standard)
- Two-year warranty
- CE standard conformity
- Vac Coat products are covered worldwide by both public and product Liability Insurance in case any property damage or personal injury happens caused by the Vac Coat systems.
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software, updatable via network
- Precise control over coating rate to achieve finer grain structures
- Semi-Full automatic coating process (Optional)
- Repeatable and programmable sputtering process in the automatic mode
- Manual or automatic timed and thickness deposition
- Able to record and plot coating parameters graphs
- Storing coating recipes for repeatable depositions
- Fine grain structural deposition for SEM and FE-SEM sample preparation
- Nano and microelectronic
- Solar cell applications
- Optical components coating
- Thin film sensors
- Able to perform GLAD sputtering
- Glow discharge plasma treatment for TEM grids or surface modifications (Optional)
- Automatic control of the deposition power independent of pressure
- Automatic control of the cathode’s temperature to protect the lifetime of the magnets
- Rapid data input through colorful touch screen panel
- Real-time plots of coating parameters
- Max. power consumption: 1.5 kW
- Quartz crystal sensor
- Planetary sample rotation stage
- Spare glass chamber
- Sputtering targets
- Plasma cleaner
- Sealing gaskets
Sample Holder Stages
The DST1 can be equipped with different sample stage configurations depending on the user requirements. The standard sample stage is rotatable with adjustable height and angle and can be changed easily. The rotary planetary sample stage is a good choice for uniform coating of porous specimens (Optional).
Newly Designed Sample Holder
A new 4-inch rotating sample holder with an optimal gear offset is designed for the system to increase the deposition area and the number of coating stubs in a run (Customizable for max. 50×1 mm stubs).
- Dimensions: 420 × 620 × 480 mm (H × W × D)
- Weight: 36 Kg
- Vacuum Chamber Dimension: Borosilicate Glass, 170 mm Dia. × 50 mm Height
- SST 90 mm Height
- Display Screen: 7” Diagonal (16:9) 800 × 480 High Color- Graphic TFT- LCD
- Data Transfer: USB Port – For Transferring the data and graph to PC
- Target Dimension: 1 Disc, Diameter ranging 50-56 mm, Thickness 0.1~3 mm (The preferred Thickness is less than 1 mm)
- Sample Holder Dimension:
- Standard holder with 60 mm Dia., can contain:
- 23 × 9.6 mm stubs or
- 14 × 12.7 mm stubs or
- 5 × 19 mm stubs
- Sample holder with 100 mm Dia. with Offset gear box can contain 40 × 12.7 mm stubs (Optional)
- Standard holder with 60 mm Dia., can contain:
- Chamber’s Lid: Made of Aluminum and can locate 1 Cathode on it
- Specification: Crystal thickness gauge with sensor, Silver coated crystal quartz, oscillator
- Resolution: ±1 Angstrom
- Accuracy: ±1 Nanometer
- Turbo Molecular Pump: Pumping speed of 90 L/s, (Leybold)
- Backing Pump: Two-stage rotary vane pump (Optional), scroll or diaphragm pump can be used either.
- Pressure Gauge: Leybold (Ionivac model); Full Range
- Sputtering Vacuum Range: 5 × 10-2 ~ 5 × 10-3 Torr
- Final Vacuum: < 5 × 10-6
- Sputtering: Continuous sputtering, time, and thickness dependent
- Glow Discharge Plasma (Optional):
- TEM grid plasma treatment
- Enhancing surface hydrophilicity
- Gas: Argon as a carrier gas with %99.999 purity
- Shutter: 1 piece
- Control of Argon supply: Electronic valve
- Electrical Inlet: Inlet: 220 V-110 V, 50/60 HZ *
* Single-phase AC power with appropriate earth connection is required.
Talk to Our Engineers
