Vacuum Coating System

DSR1 full face

 DSR1

The Desk SEM Coater model DSR1 is a compact coating system able to coat carbon film and noble metals such as gold (Au), palladium (Pd), platinum (Pt) and gold/palladium (Au/Pd) on non-conductive or poorly conductive specimens.

DTT full face

DTT

The DTT is a desktop, a turbomolecular-pumped thermal evaporator for vacuum deposition of thin films. The triple-source evaporation with evaporation  (boat/basket/coil) selection system is ideal for deposition …

dst3-a full face

DST3

The Desk Sputter Coater DST3 is a desktop, triple target, turbo molecular-pumped vacuum sputter coater, suitable for magnetron sputtering of the semiconductors, dielectrics and (oxidizing & noble) metals.

 DST3-T

DST3T is prepared for sputtering and thermal evaporation deposition. This device is equipped by two 3” angled magnetron cathode, turbo molecular pump, one thermal source, RF power supply, DC and high …

desk carbon coater

DCR

Desk Carbon Coater is a compact carbon fiber coating system suitable for sample preparation for the use in a scanning electron microscope (SEM), Transmission electron microscope (TEM) and X-Ray analysis (EDX).

 DST1-300

The magnetron desk sputter coater model DST1 is a coating system with the ability to coat semiconductors, dielectrics, and metals (oxidizing and non-oxidizing). Uniform thin films with fine-grain sizes are formed …

 DCT

DCT is a turbo-pumped carbon coater that is ideal for FE-SEM, EDS/WDS, TEM, EBSD, and thin film applications. This high vacuum coater offers high-quality uniform carbon films with fine grain sizes which are suitable for …

pulsed laser deposition

PLD-T

PLD – T is a high vacuum thin film deposition system enables to deposit different materials by both Pulsed Laser Deposition and thermal evaporation technique. It can deposit complex materials and crystalline structures …

DSCT

The DSCT is configured as a sputter coater and fiber carbon coater with interchangeable heads in one instrument suitable for Scanning Electron Microscope (SEM) sample preparation…

 DSCR

The Desk SEM Coater model DSCR is a compact coating system included both of sputter and so carbon coater. This system is able to sputter noble metals such as gold (Au), palladium (Pd), platinum (Pt) and gold/palladium…

Vacuum Sputtering and Thermal Coating System

VCS100F

VCS100F is sputtering system and thermal evaporation platform with turbo molecular pump for high vacuum. This system is equipped with two magnetron cathode with 3 degrees of freedom adjustment, DC power supply, RF …

 

 Coating ProcessThin-Film DepositionPower SuppliesVacuum PumpsSome Other Features
 SputteringCarbon EvaporationResistance Thermal EvaporationPulsed Laser DepositionMulti-layer depositionCo-Sputtering or Co- EvaporationRF Power Supply DC Power SupplyHigh Current Power SupplyRotary PumpTurbo Pump*Size of Vacuum ChamberNumber of Targets or Thermal Source s
 DSR1 ✔       ✔  ✔  S 1
 DSCR ✔      ✔ ✔ ✔  S 1
 DCR  ✔       ✔ ✔  S 
 DST1-170 ✔       ✔  ✔ ✔ S 1
 DST1-300 ✔      ✔ ✔  ✔ ✔ L 1
 DSCT ✔ ✔      ✔ ✔ ✔ ✔ S 1
 DCT  ✔       ✔ ✔ ✔ S 
 DST3-A ✔    ✔ ✔ ✔ ✔  ✔ ✔ L 3
 DST3-S ✔    ✔  ✔ ✔   ✔ ✔ L 3
 DST3-TA ✔  ✔  ✔ ✔ ✔ ✔ ✔ ✔ ✔ L 3
 DST3-TS ✔  ✔  ✔  ✔ ✔ ✔ ✔ ✔ L 3
 DTT   ✔  ✔ ✔   ✔ ✔ ✔ L 3
 PLD    ✔ ✔     ✔ ✔ L 3
 PLD-T   ✔ ✔ ✔ ✔   ✔ ✔ ✔ L 3
              

 

  *Size of Vacuum Chamber

  Large (L) - OD: 300 mm, Height: 210mm – (For DTT model Height is 250 mm or more depending on the customer request )       

  Small (S) – OD: 170 mm, Height: 140 mm

 

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