Products
High Vacuum Thermal Evaporator – DTE
for controlled deposition in research and laboratory
High-vacuum Thermal Evaporation System
DTE is a desktop thermal evaporator system to deposit thin layers of materials on the substrate for research purposes and investigation by electron microscopy. DTE is configured as a material evaporator suitable for sample evaporant experiments. This low-budget, small chamber, and high-vacuum system is ideal for short time deposition of noble and oxidizing metals.
Thermal Evaporation
DTE is equipped with a high current power supply and low-voltage (Resistive) thermal evaporation platform suitable for a wide variety of thermal evaporation applications. The system allows controlled thermal evaporation of a wide range of materials onto the substrate. Different types of thermal evaporation sources (Boat, basket, and coil) can be installed on the single thermal source holder.
Touch Screen Control
DTE is equipped with a 7” colored touch-screen panel using user-friendly software to control the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen and the last 300 coatings are saved on the history page.
Clean Vacuum
The vacuum chamber consists of a portable cylindrical Pyrex. The DTE is fitted with an internally mounted 90 L/s turbo molecular pump, backed by a 6 m3/h two-stage rotary vane pump (Optional). It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.
- DC high-current power supply (Max. 12 V, 100 A)
- 170 mm diameter Borosilicate-SST vacuum chamber
- High vacuum level with built-in turbo pump (Leybold 90 l/s)
- Two-stage rotary (Optional diaphragm or scroll) backing pump
- Quartz crystal monitoring system for real time thickness measurement (1 nm precision)
- Electronic shutter
- Two high-current electric feed-throughs for thermal source insertion
- Movable thermal source holder with possible upward or downward deposition configurations
- Automatic venting valve
- Full range vacuum gauge
- S-Clip sample holder on the chamber's lid
- 2-inch rotating sample holder on the base plate (Optional)
- Sample rotation, height, and tilt adjustable (For optional 2-inch sample holder)
- Two-year warranty
- CE conformity
- Vac Coat products are covered worldwide by both public and product Liability Insurance in case any property damage or personal injury happens caused by the Vac Coat systems.
- Intuitive touch screen to control the vacuuming process and device manipulation
- User friendly software, updatable via network
- Semi-automatic evaporation process control
- Controlled thin film deposition based on the set thickness
- Records and plots coating parameters graphs
- Metal thin films
- Nano and microelectronic
- Solar cell applications
- Thin film sensors
- Fine grain structural deposition for SEM and FE-SEM sample preparation
- Carbon fiber evaporation in flash mode for SEM sample preparation
- TEM grid/aperture cleaning
- Fast-cycle deposition process
- Real-time plot of coating parameters
- Max power consumption: 1.2 kW
- Quartz crystal sensor
- Spare glass chamber
- Sealing gaskets
- Source boats and baskets
- Glow discharge plasma
Sample Holder Stages
DTE deposition system enables metal evaporation in upward and downward configurations.
- Upward deposition: The material is loaded in a boat source and the sample is attached to the S-Clips on the chamber lead to allow easy access.
- Downward deposition: A small amount of desired material is loaded in the basket with rotating sample holder (Optional) on the baseplate.
DTE Operation Requirements
DTE is a deposition system with a small chamber, making it a compact, light-weight, quick- vacuuming, and low-budget coating device. Although, due to its small chamber, there are some advisory notes regarding this device:
- DTE is ideal for short-term thin film coatings, whereas long-term thick layer depositions may damage the chamber.
- The device is ideal for deposition of source materials with low vaporization temperature.
- The maximum sample diameter could not exceed 2 inches for rotating substrate holder.
If these coating conditions do not suit your purpose, you can try our DTT model with a large 300 mm Dia. chamber and three-thermal sources.
- Dimensions: 450 × 620 × 480 mm (H × W × D)
- Weight: 30 Kg (Without backing pump)
- Vacuum Chamber Dimension:
- Borosilicate Glass, 170 mm Dia. × 50 mm Height
- SST, 170 mm Dia. × 90 mm Height
- Display Screen: 7” Diagonal (16:9) 800 × 480 High Color- Graphic TFT- LCD
- Data Transfer: USB Port – For Transferring the data and graph to PC
- Evaporator filament boat/basket:
- Boat: max. 1 mm thickness, max. 8 mm width, 30-65 mm length
- Basket: Single wire with 0.5-0.8 mm Dia.
- Sample Holder Dimension:
- Standard holder with 50 mm Dia., can contain:
- 16 × 9.6 mm stubs or
- 9 × 12.7 mm stubs or
- 4 × 19 mm stubs
- Standard holder with 50 mm Dia., can contain:
- Chamber’s Lid: Made of Aluminum/SST with high-current feedthroughs and source holder extensions.
- Specification: Crystal thickness gauge with sensor, gold coated crystal quartz for deposition thickness monitoring, oscillator
- Resolution: ±1 Angstrom
- Accuracy: ±1 Nanometer
- Turbo Molecular Pump: Pumping speed of 90 L/s, (Leybold)
- Backing Pump: Two-stage rotary vane / diaphragm pump / scroll pump
- Pressure Gauge: Leybold (Ionivac model); Full range
- Final Vacuum: 8 × 10-6 Torr
- Metal Evaporation: Small amounts of metal loaded in the boat / basket / coil is evaporated.
- Glow Discharge Plasma (Optional):
- TEM grid plasma treatment
- Enhancing surface hydrophilicity
- SEM / TEM aperture cleaning
- Electric Power Supply: High current: 12 V, 100 A
- Venting Valve: Electronic leak valve
- Shutter: 1 piece
- Electrical Inlet: Inlet: 220-240 V, 50/60 Hz; or 110 V, 50/60 Hz *
* Single-phase AC power with appropriate earth connection is required.
