Products
Turbo Pumped Desk Sputter and Carbon Coater – DSCT
for high-uniformity thin films and sample preparation
Integrated High-Vacuum Hybrid Coater
Turbo pumped sputter and carbon coater – DSCT is configured as a high-vacuum sputter coater and carbon coater with interchangeable heads in one instrument suitable for scanning electron microscope (SEM) sample preparation. The system is able to sputter noble metals such as gold (Au), palladium (Pd), platinum (Pt), and gold/palladium (Au/Pd), as well as oxidizing metals like tungsten and chromium, together with thermal evaporation of different carbon sources (Fiber or rod) to coat on samples with non-conductive or poorly conductive surface for electron microscopy imaging or other applications.
This high-vacuum SEM coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high quality characterization such as FE-SEM, EDS/WDS, TEM, and EBSD. The DSCT with a 2” magnetron cathode, 80 W switching DC power supply and high current power supply for carbon evaporation, could be used for research and different thin film applications.
DSCT can be equipped with a water-cooled cathode which makes it suitable for long time sputtering deposition. Also, DSCT can be provided with a 160 W power supply to facilitate sputtering of targets like chromium, tungsten, and other oxidizing metal targets (Optional).
The full-automatic sputter and carbon coating processes allows easy, precise, and repeatable performance. The maximum size of the substrates in this model could be 4 inches.
Carbon Evaporation
The mini-size coating system model DSCT can perform carbon coat to produce uniform thin films with fine grains on different surfaces using carbon fiber or carbon rod (Optional).
Pulsed Carbon Fiber Evaporation
The DSCT coater is able to perform pulsed carbon fiber evaporation. Short pulses provide more controlled deposition and significantly reduces the amount of debris associated with traditional carbon deposition.
Carbon Rod Evaporation (Optional)
The DSCT could be equipped with carbon rod evaporator head (optional). For this case an external 0-100 A high current power supply should be used instead of the internal high current power supply which is designed for carbon fiber evaporation.
- High vacuum level with built-in turbomolecular pump 90 L/s (Leybold)
- Two-stage rotary vane backing pump (Diaphragm and scroll pump)
- 80 W sputtering switching DC power supply
- Carbon fiber evaporation head
- 500 W switching DC power supply for carbon fiber deposition
- 1.2 kW high-current DC power supply for carbon rod deposition (Optional)
- Quartz crystal thickness monitor with precision of 1 nm and resolution of 1 Å
- One 2-inch magnetron cathode
- Automatic venting valve
- Sample rotation, height, and tilt adjustable
- Planetary sample holder (Optional)
- Electronic shutter
- Easy-to-change specimen stages (Rotation stage as standard)
- Two-year warranty
- CE conformity
- Vac Coat products are covered worldwide by both public and product Liability Insurance in case any property damage or personal injury happens caused by the Vac Coat systems.
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software, updatable via network
- Repeatable and programmable coating process in the automatic mode
- Semi-full automatic sputtering deposition process in timed or thickness modes
- Semi-full automatic carbon fiber/rod deposition process
- Automatic carbon fiber coating in flash or pulsed modes
- Automatic carbon rod coating in pulsed or ramped modes
- Records and plots coating parameters graphs
- Storing coating recipes for repeatable depositions
- Fine grain structural deposition of noble metals (Noble and oxidizing) thin film for SEM, FE-SEM, EDX, and TEM sample preparation
- Nano and microelectronic
- Conductive layers
- GLAD sputtering
- TEM grid plasma treatment for improved hydrophilicity (Optional)
- Suitable for deposition of noble metals, carbon fiber, and rod (Optional)
- Precise control over coating rate to achieve finer grain structure
- Automatic control of the cathode’s temperature to protect the lifetime of the magnets
- Rapid data input through fully automatic touch screen panel
- Real-time plot of coating parameters
- Max. consuming power: 2 kW
- Head and external power supply for carbon rod evaporation
- Quartz crystal sensor
- Planetary sample rotation stage
- Spare cylindrical vacuum glass chamber
- Sputtering targets
- Sealing gaskets
- Glow discharge plasma
- Carbon fiber source
- 4-inch sample holder with gear offset
Touch Screen Control
DSCT, the desk SEM coater, is equipped with a 7” colored touch-screen panel and full automatic control using a user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen. The last 300 coatings information is saved on the history page.
Sample Holder Stages
The DSCT can be equipped with different sample stage configurations depending on the user requirements. The standard sample stage is rotatable with adjustable height and angle and can be changed easily. The rotary planetary sample stage is a good choice for uniform coating of porous specimens (Optional).
Newly Designed Sample Holder
A new 4-inch rotating sample holder with an optional gear offset is designed for the system to increase the deposition area and the number of coating stubs in a run
- Dimensions: 520 × 620 × 480 mm (H × W × D)
- Weight: 36 Kg (Without backing pump)
- Vacuum Chamber Dimension:
- Borosilicate Glass: 170 mm Dia. × 50 mm Height
- SST: 170 mm Dia. × 90 mm Height
- Display Screen: 7” Diagonal (16:9) 800 × 480 High Color- Graphic TFT- LCD
- Data Transfer: USB Port – For Transferring the data and graph to PC
- Target Dimension: 1 Disc, Diameter ranging 50-56 mm, Thickness 0.1~3 mm (The preferred Thickness is less than 1 mm)
- Carbon Fiber: Carbon fiber thread diameter: 0.8 mm (Thicker fiber is not recommended)
- Carbon Rod: Carbon rod diameter: 3.2 mm
- Sample Holder Dimension:
- Standard holder with 60 mm Dia., can contain:
- 23 × 9.6 mm stubs or
- 14 × 12.7 mm stubs or
- 5 × 19 mm stubs
- Sample holder with 100 mm Dia. with Offset gear box can contain 40 × 12.7 mm stubs (Optional)
- Standard holder with 60 mm Dia., can contain:
- Chamber’s Lid: Made of Aluminum/SST that can locate 1 cathode or triple carbon fiber (Thread) holder or a rod holder on it.
- Specification: Crystal thickness gauge with sensor, gold/silver coated crystal quartz for Sputter/Carbon deposition thickness monitoring, oscillator
- Resolution: ±1 Angstrom
- Accuracy: ±1 Nanometer
- Turbo Molecular Pump: Pumping Speed of 90 L/s, (Leybold)
- Backing Pump: Two-stage rotary vane /diaphragm pump/scroll pump
- Pressure Gauge: Leybold (Ionivac model); Full Range
- Final Vacuum: < 8 × 10-6 Torr
- Sputtering Vacuum Range: 5 × 10-2 ~ 5 × 10-3
- Sputtering: Continuous Sputtering, Time, and Thickness dependent
- Carbon Coating:
- Pulsed and Flash mode carbon fiber coating
- Pulsed or Ramped mode carbon rod coating
- Glow Discharge Plasma (Optional):
- TEM grid plasma treatment
- Enhancing surface hydrophilicity
- Gas: Argon as a carrier gas with %99.999 purity
- Electric Power Supply:
- DC: 80 W switching DC power supply
- HC: 24V, 20A (Carbon fiber evaporation)
- HC: 12V, 100A (Carbon rod evaporation)
- Control of Argon supply: Electronic leak valve
- Shutter: 1 piece
- Electrical Inlet: Inlet: 220-240 V, 50/60 Hz; or 110 V, 50/60 Hz *
* Single-phase AC power with appropriate earth connection is required.
Clean Vacuum
The vacuum chamber is made of SST and a portable Cylindrical Pyrex. The DSCT is fitted with an internally mounted 90 L/s turbo molecular pump, backed by a 6 m3/h two-stage rotary vane pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.
