Products

Desk Sputter Coater – DSR1

for research, thin films, and sample coating

Precision Tabletop Sputtering System

The desk sputter coater model DSR1 is a compact coating system able to coat noble metals such as gold (Au), palladium (Pd), platinum (Pt), and gold/palladium (Au/Pd) thin films on non-conductive or poorly conductive specimens. Uniform thin films with fine-grain sizes can form in a fast cycle time which makes it an ideal coating system for sample preparation for scanning electron microscopy (SEM) analysis.

The Desk magnetron sputter coater (DSR1) is a high productivity tool that delivers consistent and highly repeatable results in the fully automated system. The ergonomic design and small footprint of the DSR1 SEM coating system allows easy use of the system.

The DSR1 is configured as a sputter coater suitable for scanning electron microscope (SEM) sample preparation.

Vac Coat Desktop Sputter Coater DSR1 Front

Vac Coat Desktop Sputter Coater DSR1 Monitor

The DSR1 with a 2” magnetron cathode, 80 W switching DC power supply, could be used for research and different thin film applications. DSR1 can be equipped with a water-cooled cathode which make it suitable for long time deposition. The maximum size of substrates in this model could be 4 inches.

Touch Screen Control

DSR1, the desk sputter coater, is equipped with a 7” colored touch screen and full automatic control using a user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen. The last 300 coatings information is saved on the history page and can be transferred to PC by a USB port on the device.

Two-stage, direct drive rotary vane pump 6 m3/h
80 W switching DC power supply
Quartz crystal thickness monitor with precision of 1 nm and resolution of 1 Å
One 2-inch magnetron cathode
Electronic gas valves
Sample rotation, height, and tilt adjustable
Equipped with electronic shutter
Easy-to-change specimen stages (Rotation stage as standard)
Two-year warranty
CE conformity
Vac Product DSR1 Square Without Frame Grey Big Border Vac Coat products are covered worldwide by both public and product Liability Insurance in case any property damage or personal injury happens caused by the Vac Coat systems.

Intuitive touch screen to control the coating process and rapid data input
User friendly software, updatable via network
Controls coating rate to achieve finer grain structures
Semi-full automatic coating process (Optional)
Repeatable and programmable sputtering process in the automatic mode
Manual or automatic timed and thickness deposition
Able to record and plot coating parameters graphs
Storing coating recipes for repeatable depositions

The DSR1 is a scanning electron microscope sample preparation system equipped with a rotary pump to achieve vacuum less than 50 mTorr, which is a suitable vacuum range for noble metals sputter coating.

Noble metal coating for SEM and FE-SEM sample preparation
Contact coating
Glow discharge plasma for surface modifications and improved surface hydrophilicity (Optional)

For sputtering of oxidizing metals, please see the DST1 (Turbo-pumped desk sputter coater).

Suitable for deposition of noble metals
Able to perform GLAD Sputtering
Automatic control of the cathode’s temperature to protect the lifetime of the magnets
Max. power consumption: 1.5 kW

Quartz crystal sensor
Planetary sample rotation stage
Spare glass chamber
Sputtering targets
Sealing gaskets
Glow discharge plasma rod

Sample Holder Stages

The DSR1 can be equipped with different sample stage configurations depending on the user requirements. The standard sample stage is rotatable with adjustable height and angel and can be changed easily. The rotary planetary sample stage is a good choice for uniform coating of porous specimens (Optional).

Newly Designed Sample Holder

A new 4-inch rotating sample holder (With an optional gear offset) is designed for the system to increase the deposition area and the number of coating stubs in a run.

Dimensions: 420 × 480 × 370 mm (H × W × D)
Weight: 30 Kg
Vacuum Chamber Dimension: Borosilicate Glass, 170 mm Dia. × 140 mm Height
Display Screen: 7” Diagonal (16:9) 800 × 480 High Color- Graphic TFT- LCD
Data Transfer: USB Port – For Transferring the data and graph to PC
Target Dimension: 1 Disc, Diameter ranging 50-56 mm, Thickness 0.1~3 mm (The preferred Thickness is less than 1 mm)
Sample Holder Dimension:
- Standard holder with 60 mm Dia., can contain:
  - 23 × 9.6 mm stubs or
  - 14 × 12.7 mm stubs or
  - 5 × 19 mm stubs
- Sample holder with 100 mm Dia. with Offset gear box can contain 40 × 12.7 mm stubs (Optional)
Chamber’s Lid: Made of Aluminum and can locate 1 Cathode on it

Specification: Crystal thickness gauge with sensor, gold coated crystal quartz, oscillator
Resolution: ±1 Angstrom
Accuracy: ±1 Nanometer