Products
Magnetron Desk Sputter Coater – DST1-300
for thin-film deposition across larger substrates
Magnetron sputter coater designed
The high-vacuum magnetron desk sputter coater model DST1-300 is a compact coating system capable of performing durable deposition of uniform coatings of semiconductors, dielectrics and metals (Oxidizing and non-oxidizing) with fine-grain sizes in a large 300 mm dia. chamber. The large chamber DST1-300 with a 2, 3, or 4-inch water-cooled magnetron cathode is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter.
The unlimited sputtering time makes it suitable for deposition of thick layers. The single magnetron target coater is equipped with 600 W DC power supply, or a 300 W RF power supply (Optional) with an auto matching box. The high vacuum system DST1-300 can deposit a wide range of oxidizing and non-oxidizing metal (Such as gold (Au), platinum/palladium (Pt/Pd) alloy, silver (Ag), chromium (Cr), tungsten (W), iridium (Ir), etc.), metal oxides (Like TiO2, ZnO, etc.), and dielectrics on different surfaces for thin film applications such as micro and nano electronic, and SEM sample preparation.
The DST1-300 is configured as a sputter coater that fulfills research purposes as well as scanning electron microscope (SEM) sample preparation. This high vacuum coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high quality characterization such as FE-SEM, EDS/WDS, TEM, and EBSD.
Clean Vacuum in DST1-300
The vacuum chamber is Cylindrical Pyrex. The DST1-300 is fitted with an internally mounted 90 L/s turbomolecular pump, backed by a 6 m3/h two-stage rotary vane pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.
Touch Screen Control
The DST1-300 is equipped with a 7”colored touch screen and full automatic control using a user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen. The last 300 coatings information is saved on the history page.
- Built-in turbomolecular pump (Leybold)
- Two stage rotary vane vacuum backing pump(Diaphragm and scroll pump)
- Full range vacuum gauge (Leybold)
- 600 W DC power supply
- Quartz crystal thickness monitor with precision of 1 nm and resolution of 1 Å
- Electronic gas valves
- Sample rotation, height, and tilt adjustable
- Thermal evaporation feed-throughs (Optional)
- Electronic shutter (Double-piece shutter for 4-inch cathode)
- Easy-to-change specimen stages (Rotation stage as standard)
- Two-year warranty
- CE standard conformity
- Vac Coat products are covered worldwide by both public and product Liability Insurance in case any property damage or personal injury happens caused by the Vac Coat systems.
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software, updatable via network
- Controls coating rate to achieve finer grain structures
- Semi-Full automatic coating process (Optional)
- Repeatable and programmable sputtering process in the automatic mode
- Manual or automatic timed and thickness sputtering deposition
- Able to record and plot coating parameters graphs
- Storing coating recipes for repeatable depositions
- Metal, semiconductor, and dielectric Films
- Nano and microelectronic
- Solar cell applications
- Optical components coating
- Thin film sensors
- Magnetic thin film devices
- Computer memory applications
- Able to perform Glad sputtering (With optional planetary rotation)
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Fine grain structural deposition of metals for SEM, FE-SEM, and TEM sample preparation
- High-vacuum level with built-in turbo pump (Leybold)
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Pumping Speed
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90 l/s
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250 l/s
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350 l/s
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Ultimate Pressure
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8×10-6
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3×10-6
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8×10-7
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- Precise control over the sputtering rate to achieve finer grain structure
- Automatic control of the deposition power independent of pressure
- Automatic control of the cathode’s temperature to protect the lifetime of the magnets
- Rapid data input through fully automatic touch screen panel
- Real-time plots of coating parameters
- Deposition process data transfer to PC by a USB port
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Max. power consumption: 2 kW
- Substrate bias voltage
- RF generator and auto matching box
- Substrate heater (Up to 500 C)
- Quartz crystal sensor
- Thermal evaporation boats/baskets
- Planetary rotating sample holder
- Glow discharge plasma
- Vacuum cylindrical spare glass chamber
- Sputtering targets
- Sealing gaskets
Sample Holder Stages
The samples in DST1-300 can be mounted on different rotatory sample holder stages. The standard sample holder stage is rotatable with adjustable height and angle that can be changed easily.
- Dimensions: 550 × 550 × 650 mm (H × W × D)
- Weight: 50 Kg (Without backing pump)
- Vacuum Chamber Dimension: Borosilicate Glass, 300 mm Dia. × 200 mm Height
- Display Screen: 7” Diagonal (16:9) 800 × 480 High Color- Graphic TFT- LCD
- Data Transfer: USB Port – For Transferring the data and graph to PC
- Target Dimension: 1 Disc, Diameter ranging 50-56 mm / 76-80 mm / 100-106 mm (Based on the ordered cathode dimension), Thickness 0.1~3 mm (The preferred thickness is less than 1 mm)
- Sample Holder Dimension: Rotating sample holder stages with different diameters (up to 6 inches) are available.
- Chamber’s Lid: Made of Aluminum and can locate one cathode on it.
- Specification: Crystal thickness gauge with sensor, oscillator
- Resolution: ±1 Angstrom
- Accuracy: ±1 Nanometer
- Turbo Molecular Pump: Pumping speed of 90 L/s (Leybold)
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Backing Pump: Two-stage rotary vane pump
- Pressure Gauge: Leybold (Ionivac model); Full Range
- Final Vacuum: < 5 × 10-6
- Sputtering Vacuum Range: 5 × 10-2 ~ 5 × 10-3 Torr
- Sputtering: Continuous sputtering, time, and thickness dependent
- Gas: Argon as a carrier gas with %99.999 purity
- Electric Power Supply:
- DC: 600 W switching DC power supply (Optional)
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RF: 300 W RF power supply with auto matching box (Optional)
- Control of Argon supply: Electronic leak valve
- Electrical Inlet: Inlet: 220-240 V, 50/60 Hz; or 110 V, 50/60 Hz *
* Single-phase AC power with appropriate earth connection is required.
