New Update in Vac Coat RF Generators
Vac Coat RF generators have been updated with a new capability that allows the user to adjust RF power at a programmable rate. This feature enables a controlled increase in the RF power applied to the sputter cathode and target, which is crucial to prevent heat shock and target damage, particularly with ceramic targets.
Vac Coat offers RF generators on its sputter coaters, such as the DST1-300, and hybrid coaters with sputtering cathodes, like the DSCT-300, DST3-T, and DST2-TG, for sputter deposition of non-conductive targets, including ceramics and semiconductors. RF sputtering overcomes the DC sputter coating shortcomings in the case of sputter deposition of insulating targets, in which charge accumulation on the target surface hinders the coating process.
Since insulating targets are not good conductors of heat either, a sudden power-up may cause a thermal shock to them, resulting in target cracking that negatively affects the coating process. Controlled RF power rise can help to execute a sustainable deposition.
In the recent update of the Vac Coat RF generators software, if the Power Rise Speed (P.R.S) is set to a value greater than zero, the output power will increase from the initial to the final power according to the rate determined by the P.R.S parameter. This feature ensures more convenient sputter coating processes.
