Vacuum Sputtering and Thermal Coating System

Vacuum Sputtering and Thermal Coating System

Our system is the most improved system in the world and has the following technical detail.

Vacuum Sputtering and Thermal Coating System.

 

  • Two cathode magnetron with 3 degrees of freedom adjustment.
  • DC power supply with automatic matching box.
  • Thermal evaporation platform with 300 A current.
  • Boat holder and current display.
  • Double layers water-cooled vacuum chamber.
  • Turbomolecular pump for high vacuum.
  • Backup the rotary pump.
  • Smart valve for turbopump with a touchscreen monitor.
  • Electro-pneumatic valves.
  • Crystal thickness monitor with 1nm resolution and 4 sensor holder.
  • Substrate holder with electronic shutter and electronic feedthrough four Magnetron.
  • Two-stage backup rotary pump.
  • Smart valve for turbopump.Touch screen interface.
  • Quartz crystal thickness monitor with 1 nm resolution and 4 sensor holder.
  • Customizable.
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