Vacuum Coating Systems
Desk SEM Coater – DSR1 is a compact vacuum coating system able to coat noble metals such as gold (Au), palladium (Pd), platinum (Pt), and gold/palladium (Au/Pd) thin films on non-conductive or poorly conductive specimens.
The triple target turbomolecular pumped sputter coater – DST3-T is a vacuum coating system that combines thermal evaporator and sputter coater in one single compact desktop system. It deposits a wide range of materials.
Desk carbon coater – DCR is one of the compact vacuum coating systems. This carbon coating system is suitable for sample preparation for use in the scanning electron microscope (SEM), TEM, and EDX.
DTT is a desktop thermal evaporator for vacuum deposition of thin films. The triple-source evaporation or desk thermal evaporator with evaporation source selection system is ideal for deposition of multilayers or alloys.
DCT is a turbo-pumped carbon coating system that is ideal for FE-SEM, EDS/WDS, TEM, EBSD, and thin film applications. The carbon coater offers high quality uniform carbon films with fine grain sizes which are suitable for specimens.
Versatile pulsed laser deposition and thermal evaporator system – PLD-T is a high vacuum thin film deposition system enables to deposit different materials by both pulsed laser deposition & thermal evaporation technique.
High vacuum sputter coater – DST1-170 is configured as a desk sputter coater suitable for scanning electron microscope sample preparation. A wide range of materials could be deposited by DST1-170 such as gold & silver.
Sputter and carbon coater – DSCR is a compact coating system included both of sputter & carbon coater. The DSCR is able to sputter noble metals on the specimens and able to coat carbon film on the samples.
Magnetron sputter coater – DST1-300 is a coating system with ability to coat semiconductors, dielectrics and metals (Oxidizing & non-oxidizing). Uniform thin films with fine-grain sizes are formed in a fast cycle time.
Turbo pumped sputter and carbon coater – DSCT is configured as a sputter coater and carbon coater with interchangeable heads in one instrument suitable for scanning electron microscope sample preparation.
The sputter coater and carbon/thermal eEvaporator – DSCT-T is configured as a sputter coater, carbon coater, and Thermal Evaporator with three heads in one instrument suitable for SEM sample preparation.
The large chamber desk sputter and carbon coater – DSCR-300 with 3 or 4 inch water-cooled magnetron cathodes is a compact coating system for both of sputter and carbon coating. DSCR-300 is suitable for coating large specimens.
Vacuum sputter and thermal coater – VCS100F is a versatile vacuum coating system that included thermal evaporation and sputtering deposition methods. VCS100F chamber is larger than the desktop models.