Ultra-High Vacuum Systems

Ultra-High Vacuum Systems

Carbon Coater, Pulsed Laser deposition, Sputter Coater, Thermal evaporation
Since vacuum means no material, what is actually measured as vacuum, is the residual gas pressure in the chamber.   Three different units of expression are usually used to express the pressure: Pascal (Pa), Torr, and mbar. Vacuum quality is also usually classified into three categories: Rough Vacuum, High Vacuum and Ultra-High Vacuum. Ultra-High Vacuum (UHV) is called pressure range less than 10-7 Pascal or 10-9 Torr. Classification of different vacuum levels When an ionic or electron beam collides with particles (residual gas inside the chamber), it may deviate from its path, divide or even react with that particle. As a result, the presence of unwanted particles in the system will reduce its efficiency. Mean Free Path (MFP) is the average distance traveled by a gas molecule before colliding with another…
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