DST2-TG: Introducing New Product

An Overview of DST2-TG: Sputter Coater & Thermal Evaporator for Glove Box

VacCoat Ltd. has successfully designed and manufactured a new product, desk sputter coater and thermal evaporator for glove box, DST2-TG. This turbo-pump equipped coating system can perform thin film depositions by high-vacuum switchable sputtering and thermal evaporation techniques, enabling multilayer deposition, without breaking the vacuum condition.

Multilayer Coatings by Switchable Sputtering and Thermal Evaporation

DST2-TG contains two sputtering cathodes and a pair of high-current electrodes for loading one thermal evaporation source, where the number of cathodes/evaporation sources could be modified due to costumer demands, with an overall three deposition sources accessible. Carbon deposition is also made possible by loading carbon fiber on the high-current electrodes.

Coating under Highly Controllable Vacuum Condition

VacCoat Ltd. has introduced DST2-TG to meet the demands of its valuable customers for preparing high-purity coatings and better control over vacuum conditions, made possible by glove box mounted systems like sputter coater/thermal evaporator for glove box –DST2-TG. With the use of deposition systems inside a glove box, the vacuum level could be highly controlled, suitable for deposition of oxidizing coatings.

Vac Coat product DST2-TG All Chamber | Desk Sputter Coater and Thermal Evaporator for Glove Box

Oxidizing, non-oxidizing and noble metals can be deposited by this coating device. According to the customer, the coating system can be offered with a radio-frequency (RF) power supply to do RF sputtering for insulating/semi-conductor targets deposition. Plasma cleaner is another optional facility provided for this model.

A Quick View on DST2-TG Specifications

Sputter coater and thermal evaporator for glove box, DST2-TG, with a 7” colored touch-screen panel using user-friendly software to control and adjust the deposition process data, can be connected to pc through a Wi-Fi connection; granting access to the panel window on pc while the system is mounted in a glove box.

vac product DST2-TG Three Shots Square without Frame Grey Big Border

Important Features of DST2-TG

Another key features of DST2-TG coating system include:

  • Glovebox mounted KF40 feedthroughs
  • Two-stage rotary vane backing pump
  • Full range vacuum gauge
  • Large chamber (300 mm diameter, 20-25 cm height) suitable for large specimen depositions
  • Electrical lift arm to ride up and down the vacuum chamber
  • Two 2” water–cooled sputtering cathodes
  • Easy and quick target installation: No target holder needed
  • Boosted heat conduction utilizing targets with backing plate
  • Two quartz crystal sensors (1 nm precision) for real-time thickness measurement
  • Gas injection control through MFCs
  • Electronic shutters
  • Cathode selection motor
  • Sample rotation, height and tilt adjustable
  • Manual or automatic timed and thickness deposition
  • Storing coating up to 8 recipes for repeatable depositions
Vac Coat product DST2-TG with Gove Box | Desk Sputter Coater and Thermal Evaporator with Glove Box
Vac Coat product DST2-TG Inner Chamber

DST2-TG Applications

This coating system is optimized for thin film deposition utilized in micro-nano electronics, sensors, solar cells, Li-ion batteries, and many other applications. Also, DST2-TG sputter coater/thermal evaporator can be used for sample preparation for scanning electron microscopy (SEM) and field emission-SEM (FESEM) analysis. If you are interested about electron microscopes and history of electron microscope, you can read more about them here.

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Glove box systems provide a protected environment for sensitive material, preventing any contact with air or humidity and unwanted interactions. DST2-TG high-vacuum coating system with glove box offers safe and clean substrate handling before or after a deposition process under inert gas atmosphere, and a highly controllable chamber environment, contributing to high purity thin layer deposition under high vacuum conditions.

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