Turbo pumped sputter and carbon coater – DSCT is configured as a high-vacuum sputter coater and carbon coater with interchangeable heads in one instrument suitable for scanning electron microscope (SEM) sample preparation. The system is able to sputter noble metals such as gold (Au), palladium (Pd), platinum (Pt), and gold/palladium (Au/Pd), as well as oxidizing metals like tungsten and chromium, together with thermal evaporation of different carbon sources (Fiber or rod) to coat on samples with non-conductive or poorly conductive surface for electron microscopy imaging or other applications.
This high-vacuum SEM coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high quality characterization such as FE-SEM, EDS/WDS, TEM, and EBSD. The DSCT with a 2” magnetron cathode, 80 W switching DC power supply and high current power supply for carbon evaporation, could be used for research and different thin film applications.
DSCT can be equipped with a water-cooled cathode which makes it suitable for long time sputtering deposition. Also, DSCT can be provided with a 160 W power supply to facilitate sputtering of targets like chromium, tungsten, and other oxidizing metal targets (Optional).
The full-automatic sputter and carbon coating processes allows easy, precise, and repeatable performance. The maximum size of the substrates in this model could be 4 inches.
Features of DSCT
Hardware
- High vacuum level with built-in turbomolecular pump 90 L/s (Leybold)
- Two-stage rotary vane backing pump (Diaphragm and scroll pump)
- 80 W sputtering switching DC power supply
- Carbon fiber evaporation head
- 0-25 A pulsed DC power supply for carbon fiber evaporation
- 0-100 A DC power supply for carbon rod evaporation (Optional)
- Full range vacuum gauge (Leybold)
- Quartz crystal thickness monitor with precision of 1 nm and resolution of 1 Å
- One 2-inch magnetron cathode
- Automatic venting valve
- Sample rotation, height, and tilt adjustable
- Planetary sample holder (Optional)
- Electronic shutter
- Easy-to-change specimen stages (Rotation stage as standard)
- Two-year warranty
- CE conformity
- Vac Coat products are covered worldwide by both public and product Liability Insurance in case any property damage or personal injury happens caused by the Vac Coat systems.
Automation
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software, updatable via network
- Repeatable and programmable coating process in the automatic mode
- Semi-full automatic sputtering deposition process in timed or thickness modes
- Semi-full automatic carbon fiber/rod deposition process
- Automatic carbon fiber coating in flash or pulsed modes
- Automatic carbon rod coating in pulsed or ramped modes
- Records and plots coating parameters graphs
- Storing coating recipes for repeatable depositions
Carbon Evaporation of DSCT
Mini-size coating system model DSCT can carbon coat with fine grains to produce uniform thin films on different surfaces using carbon fiber or carbon rod (Optional).
Pulsed Carbon Fiber Evaporation
The DSCT coater is able to perform pulsed carbon fiber evaporation. Short pulses provide more controlled deposition and significantly reduces the amount of debris associated with traditional carbon deposition.
Carbon Rod Evaporation (Optional)
The DSCT could be equipped with carbon rod evaporator head (optional). For this case an external 0-100 A high current power supply should be used instead of the internal high current power supply which is designed for carbon fiber evaporation.
Touch Screen Control
DSCT, the desk SEM coater, is equipped with a 7” colored touch-screen panel and full automatic control using a user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen. The last 300 coatings information is saved on the history page.
Sample Holder Stages
The DSCT can be equipped with different sample stage configurations depending on the user requirements. The standard sample stage is rotatable with adjustable height and angle and can be changed easily. The rotary planetary sample stage is a good choice for uniform coating of porous specimens (Optional).
Clean Vacuum
The vacuum chamber is Cylindrical Pyrex. The DSCT is fitted with an internally mounted 90 L/s turbo molecular pump, backed by a 6 m3/h two-stage rotary vane pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.
Rotary Planetary Sample Stage
Standard Sample Stage
Newly Designed Sample Holder
A new 4-inch rotating sample holder is designed for the system to increase the deposition area and the number of coating stubs in a run (Customizable for max. 50×1 mm stubs).
Specifications of DSCT
- Suitable for deposition of noble metals, carbon fiber, and rod (Optional)
- Precise control over coating rate to achieve finer grain structure
- 170 mm OD × 140 mm H vacuum chamber
- Dimensions: 54 cm H x 50 cm W x 45 cm D
- Ultimate vacuum: Less than 8 x10-6 Torr
- Automatic control of the cathode’s temperature to protect the lifetime of the magnets
- Rapid data input through fully automatic touch screen panel
- Real-time plot of coating parameters
- Deposition process data transfer to PC by USB port
- Utilities: 220 V/110 V, 50/60 HZ – 2 kW
- Shipping weight (Included vacuum pump): 46 Kg
Applications of DSCT
- Fine grain structural deposition of noble metals for SEM, FE-SEM, EDX, and TEM sample preparation
- Nano and microelectronic
- Conductive layers
- GLAD sputtering
Options and Accessories
- Head and external power supply for carbon rod evaporation
- Quartz crystal sensor
- Planetary sample rotation stage
- Spare cylindrical vacuum glass chamber
- Sputtering targets
- Sealing gaskets
- Plasma cleaner
- Carbon fiber source
